| 摘要 |
PROBLEM TO BE SOLVED: To provide a microfabrication device where the utilizing efficiency of materials is high and the size of which can be reduced. SOLUTION: The processor is provided with: a stylet; a first carrying mechanism capable of carrying the stylet; a fluidized body coating mechanism capable of coating the face to be worked with a fluidized body; a second carrying mechanism capable of carrying the fluidized body coating mechanism; an energy feeding apparatus capable of applying fixed voltage to the space between the stylet and the fluidized body; and a controlling apparatus of controlling the first carrying mechanism, the fluidized body coating mechanism, the second carrying mechanism and the energy feeding apparatus. The controlling apparatus can carry the fluidized body coating mechanism by a control signal Sx2, a control signal Sy2 and a control signal Sz2. COPYRIGHT: (C)2007,JPO&INPIT
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