发明名称 Apparatus and method for optically detecting an object
摘要 Apparatus and method for optically detecting an object. The apparatus includes a light source to illuminate an object, an illumination optical path, a detection optical path, imaging optics, a detection means, wherein the imaging optics are arranged in the detection optical path and wherein light from the object can be imaged onto the detection means with the aid of the imaging optics, an adjustment means is provided, by means of which at least one imaging optical component, arranged in the illumination optical path or in the detection optical path, is rotatable about its respective optical axes, or is pivotable with respect to the optical axis of the optical path in which the optical component is arranged, and is translatable in a direction transverse to the optical axis, to detect an object with the aid of the optical component in a rotated, pivoted or translated state.
申请公布号 US2006275017(A1) 申请公布日期 2006.12.07
申请号 US20060437953 申请日期 2006.05.19
申请人 VISTEC SEMICONDUCTOR SYSTEMS GMBH 发明人 SULIK WOLFGANG;BOESSER HANS-ARTUR
分类号 G02B6/00 主分类号 G02B6/00
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