| 摘要 |
A system of process control. A measurement database stores work-in-process (WIP) measurement data. A monitor database stores tool monitor data. A design of experiment (DOE) database stores DOE data determined by a method of design of experiment, comprising tool operation data and WIP measurement data. A processor determines a compensation value according to preset process target data and the WIP measurement data, and determines tool adjustment data according to the compensation value, the tool monitor data, and the formula pertaining to processing factors.
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