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发明名称
Verfahren zur Herstellung von mikromechanischen Bauelementen
摘要
申请公布号
DE19734113(B4)
申请公布日期
2006.12.07
申请号
DE1997134113
申请日期
1997.08.07
申请人
ROBERT BOSCH GMBH
发明人
SCHIELEIN, DORIS;SKAPA, HELMUT;MUENZEL, HORST;OFFENBERG, MICHAEL
分类号
H01L21/306;B81C1/00;G01P15/08;H01L49/00
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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