| 摘要 |
<P>PROBLEM TO BE SOLVED: To resolve a problem that measurement is impossible in a state without surface loss at all during measurement due to re-adhesion in an environment after washing even if any process is applied in washing during optical characteristic measurement of optical members. <P>SOLUTION: The method has a step for washing a sample for measurement and a sample for monitoring in the same batch, a step for conveying in the same environment and a step for measuring the optical characteristic in the same batch. The surface loss is calculated by using the measured value of the sample for monitoring, and the transmissivity of the sample to be measured and reflectivity are corrected. <P>COPYRIGHT: (C)2007,JPO&INPIT |
