| 摘要 |
PROBLEM TO BE SOLVED: To provide a chip suction structure which is adaptive to a decrease in diameter of a suction hole accompanying size reduction of a chip. SOLUTION: A fiber sensor 14 is provided below a light emitting element 12 through a connection 13. The fiber sensor 14 converges the light 23 from the light emitting element 12 by a head 21, and guides it to a tip of an optical fiber 22. The fiber 22 extending from the head 21 is inserted into a shaft 35 of a ball spline 34 and connected to a collet 51 fitted to a collet holder 41. Consequently, the chip can be sucked by supplying negative pressure supplied to the collect holder 41 to the suction hole of the collet 51, and the light guided by the optical fiber 22 can be projected out through the suction hole. COPYRIGHT: (C)2007,JPO&INPIT
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