INLAY LENS, SOLID-STATE IMAGE SENSING ELEMENT, ELECTRONIC INFORMATION DEVICE, FORMATION METHOD OF INLAY LENS AND MANUFACTURING METHOD OF SOLID-STATE IMAGE SENSING ELEMENT

摘要

PROBLEM TO BE SOLVED: To realize improvement of sensitivity and fining in the future by restricting a focal distance of a lens to the minimum necessity without increasing it more than an interlaminar film thickness by further thinning an element. SOLUTION: An inlay lens 109 having a convex lens shape only downward is formed without increasing a distance between an on-chip micro lens 112 and a silicon substrate as a lens formation region, by realizing high refractive index in a metallic ion implantation region alone in a first flattening layer 108 by injecting metallic ion into the first flattening layer 108 of an existing interlaminar film without using an inlay lens material. COPYRIGHT: (C)2007,JPO&INPIT