| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element which can be miniaturized and by which productivity of an inspection is enhanced and cost reduction is realized. SOLUTION: A SAW resonant element 100 is provided with a piezoelectric substrate 120, an IDT electrode 130 formed on the surface of the piezoelectric substrate 120 and constituted by intersection between a first comb electrode 140 and a second comb electrode 150, a first reflector 160 and a second reflector 170 provided on both side of the direction that surface waves of the IDT electrode 130 are propagated. A first leading electrode 143 is extended and formed by continuing a power supply conductor 142 of the first comb electrode 140 and a power supply conductor 172 of the second reflector 172 adjacent to each other. A second drawing electrode 153 is extended and formed by continuing a power supply conductor 152 of the second comb electrode 150 and a power supply conductor 163 of the first reflector 160 adjacent to each other. The first leading electrode 143 and the second leading electrode 153 are set so that each of which includes probe contact areas and distance between the first leading electrode 143 and the second leading electrode 153 has distance A between terminals of a standard probe. COPYRIGHT: (C)2007,JPO&INPIT
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