| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing method for not leaving stains such as a water stain on the surface of an object to be washed when vapor-washing the object to be washed such as a metal component, an optical component or a coating component. SOLUTION: In the washing method of the object to be washed for respectively disposing a cooling device at an upper part inside a washing chamber and a heating device at the lower part, heating a hydrophilic washing solvent by the heating device and washing the surface of the object to be washed by the vapor, after washing the object to be washed for prescribed time at the lower position of the washing chamber where the vapor of the washing solvent is dense, the object to be washed is dried at the position of a temperature roughly in the middle of the vapor temperature at the position and a vapor temperature near the cooling device. COPYRIGHT: (C)2007,JPO&INPIT
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