发明名称 Method & apparatus for formation of oriented magnetic films for magnetic recording media
摘要 A method of forming a layer of a magnetic material with radially oriented magnetic anisotropy, comprising sequential steps of providing a circular, annular disk-shaped substrate having an inner diameter and an outer diameter, forming a layer of a magnetic material with non-radially oriented magnetic anisotropy over at least one surface of the substrate, and re-orienting the magnetic anisotropy in a radial direction. Preferably, the re-orientation is performed magnetically and the radially oriented layer serves as a magnetically soft underlayer (SUL) of a magnetic recording medium. Also disclosed is a multi-chamber apparatus for performing the disclosed process.
申请公布号 US2006272937(A1) 申请公布日期 2006.12.07
申请号 US20050142478 申请日期 2005.06.02
申请人 发明人 MCLEOD PAUL S.;BRUCKER CHARLES F.;REITER JEFFREY S.
分类号 C23C14/00 主分类号 C23C14/00
代理机构 代理人
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