| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transfer device with an alignment function capable of reducing its footprint to an irreducible minimum, producing dust little, and being kept high in throughput, without having to use a wafer alignment dedicated unit or a wafer alignment actuator. SOLUTION: The wafer transfer device is equipped with a wafer holder 41 holding a wafer, an arm 40 supporting the wafer holder 41, and a stand 1. The stand 1 is equipped with a stand pad 10, and a turning base shaft 3 which supports the arm 40 fixing it, and is set rotatable about the stand pad 10. The wafer holder 41 is equipped with a position detecting sensor 5 which detects the reference position of the wafer, such as notches or orientation flats, and a wafer-mounting pad 11 with the wafer placed thereon is provided to the stand 1 so as to position the turning shaft 3 on the axis of rotation. COPYRIGHT: (C)2007,JPO&INPIT |
