| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storage container which further reduces the generation of particles due to friction/sliding with a substrate. SOLUTION: The substrate storage container comprises a main object of the container having an opening, a substrate supporter, and a position regulator located farther in the rear side rather than a substrate supporter; and a lid object. When the lid object is closed, a retention groove 25 of a retainer floats and holds one end of a substrate 13 from a substrate supporter, and the other end side of substrate 13 is brought into contact with a sidewall of a position regulator. The retainer comprises a base material (framework) which has an engaging part (attachment part) attachable to the inner face of the lid, and one or a plurality of series of elastic pieces and holding grooves 25 which extend from a sidewall, facing the base material (framework) which abuts against the substrates 13, respectively. The lower slope 26 of the deepest part 28 of the retention groove 25 is set up so that it is set longer and steeper than the upper steep slope 27. COPYRIGHT: (C)2007,JPO&INPIT |
