| 摘要 |
PROBLEM TO BE SOLVED: To contact the polishing surface to the surface to be polished with a wide part in polishing a corner part, and reduce shock even when a polishing member hits a surrounding member. SOLUTION: The triangle-shape polishing member 18 having each apex angle of 60 degrees is connected to an oscillating vibration shaft 12 which is oscillatingly vibrated by a motor 13 with a vibration transmission member 30 composed of a plate shape spring member. The vibration transmission member 30 has a triangle base 24 centering on a fixed hole 22 for fixedly fitting to the oscillating vibration shaft 12 and a triangle shape polishing member holding part 26 projecting from each side of the triangle base. The polishing member 18 has three polishing pieces 20 composed of a pad 32 held by a polishing holding member and a polishing sheet 36 laminated on the pad. An edge 20-1 of the polishing piece is extended further to the outside more than the edge of the polishing member holding part 26. COPYRIGHT: (C)2007,JPO&INPIT |
