| 摘要 |
PROBLEM TO BE SOLVED: To provide a process for producing a nozzle plate having a liquid exclusion film formed on the liquid drop ejection side surface through a simple production process without using resist. SOLUTION: The process for producing a nozzle plate comprises a step for forming a hole penetrating the both sides of a nozzle forming substrate 62 with a diameter larger than that of a nozzle hole, a step for forming a lyophilic film 66 on the inner wall face of the hole formed in the step for forming a hole such that at least a part of the hole is closed, a step for forming a liquid repellent film 68 on the liquid drop ejection side surface of the nozzle forming substrate following to the step for forming a lyophilic film, and a step for forming a nozzle hole at a part of the hole closed with the liquid exclusion film following to the step for forming a liquid exclusion film. COPYRIGHT: (C)2007,JPO&INPIT
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