发明名称 |
CALIXRESORCINARENE COMPOUND, PHOTORESIST BASE COMPRISING THE SAME, AND COMPOSITION THEREOF |
摘要 |
<p>A calixresorcinarene compound represented by the formula (1): [Chemical formula 27] (1) [wherein the eight R's are n (n is an integer of 1-7) substituents of at least one kind each selected among the groups represented by the following formula (2) and m (m is an integer satisfying m=8-n) hydrogen atoms; and R's may be the same or different and each represents a C<SUB>2-12</SUB> linear aliphatic hydrocarbon group, C<SUB>3-12</SUB> branched aliphatic hydrocarbon group, phenyl, p-phenylphenyl, p-tert-butylphenyl, aromatic group represented by the following formula (3), or substituent comprising a combination of two or more of these substituents: [Chemical formula 28] (2) [Chemical formula 29] (3) [wherein R" represents hydrogen or a substituent selected among the groups represented by the formula (2)]].</p> |
申请公布号 |
WO2006129574(A1) |
申请公布日期 |
2006.12.07 |
申请号 |
WO2006JP310577 |
申请日期 |
2006.05.26 |
申请人 |
OWADA, TAKANORI;IDEMITSU KOSAN CO., LTD.;KINOSHITA, HIROO;WATANABE, TAKEO;ISHII, HIROTOSHI |
发明人 |
KINOSHITA, HIROO;WATANABE, TAKEO;ISHII, HIROTOSHI;OWADA, TAKANORI |
分类号 |
G03F7/039;C07C69/736;H01L21/027 |
主分类号 |
G03F7/039 |
代理机构 |
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