发明名称 CALIXRESORCINARENE COMPOUND, PHOTORESIST BASE COMPRISING THE SAME, AND COMPOSITION THEREOF
摘要 <p>A calixresorcinarene compound represented by the formula (1): [Chemical formula 27] (1) [wherein the eight R's are n (n is an integer of 1-7) substituents of at least one kind each selected among the groups represented by the following formula (2) and m (m is an integer satisfying m=8-n) hydrogen atoms; and R's may be the same or different and each represents a C&lt;SUB&gt;2-12&lt;/SUB&gt; linear aliphatic hydrocarbon group, C&lt;SUB&gt;3-12&lt;/SUB&gt; branched aliphatic hydrocarbon group, phenyl, p-phenylphenyl, p-tert-butylphenyl, aromatic group represented by the following formula (3), or substituent comprising a combination of two or more of these substituents: [Chemical formula 28] (2) [Chemical formula 29] (3) [wherein R" represents hydrogen or a substituent selected among the groups represented by the formula (2)]].</p>
申请公布号 WO2006129574(A1) 申请公布日期 2006.12.07
申请号 WO2006JP310577 申请日期 2006.05.26
申请人 OWADA, TAKANORI;IDEMITSU KOSAN CO., LTD.;KINOSHITA, HIROO;WATANABE, TAKEO;ISHII, HIROTOSHI 发明人 KINOSHITA, HIROO;WATANABE, TAKEO;ISHII, HIROTOSHI;OWADA, TAKANORI
分类号 G03F7/039;C07C69/736;H01L21/027 主分类号 G03F7/039
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