| 摘要 |
PROBLEM TO BE SOLVED: To precisely measure a positional relation between a V groove-shaped groove in an optical recording medium and a recording mark formed in the V groove-shaped groove and the shape of the recording mark. SOLUTION: The recording mark is formed on the optical recording medium having the V groove-shaped groove. A scanning probe microscope 52 in a recording mark measuring instrument 50 is set to an AFM to scan the recording mark by a probe. Data processing that leaves only the bottom part of the V groove behind from the signal of an obtained uneven image is carried out to obtain an uneven image with the groove bottom part enhanced. The uneven image with the groove bottom part enhanced and a conductive AFM image obtained by detection current are combined, and the positional relation between the groove bottom part and the recording mark is measured. COPYRIGHT: (C)2007,JPO&INPIT
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