| 摘要 |
PROBLEM TO BE SOLVED: To provide a winding type compound vacuum surface treatment apparatus which is capable of simultaneously performing a plurality of surface treatments by one and the same apparatus, and miniaturized by the multifunction at low cost. SOLUTION: The winding type compound vacuum surface treatment apparatus to perform the surface treatment on a film 10 moving along a can roll 13 to be rotated in a substantially cylindrical vacuum vessel 11 comprises a plurality of surface treatment means fixed to a circumferential wall 11b of the vacuum vessel facing the can roll 13, a pair of first shielding plates 17 fixed to a bottom plate 11a of the vacuum vessel to separate a treatment zone, a plurality of second shielding plates 18 fixed to the circumferential wall 11b of the vacuum vessel to demarcate a plurality of treatment chambers A, B, C including two or more surface treatment means and one or more non-arranged circumferential wall parts 20, and a mask plate 19 fixed to the bottom plate 11a of the vacuum vessel to cover other parts than the film treatment position. By turning the circumferential wall 11b of the vacuum vessel or a part thereof in the direction in which the non-arranged circumferential wall parts 20 are present, the surface treatment means of the treatment chambers A, B, C facing the film treatment position can be changed. COPYRIGHT: (C)2007,JPO&INPIT
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