发明名称 SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 <p>A semiconductor device manufacturing apparatus includes an upper die, a lower die, and a plate, which includes a cavity wherein a resin is injected and which specifies an outer shape and a thickness of a resin sealing section, and a gate for guiding the resin to the cavity, and is inserted between the upper die and the lower die. The plate further includes a resin film fixed by either cohesion or adhesion on a side which comes into contact with a substrate electrode. A semiconductor device having no resin burr generated on the substrate at an end plane portion of a molding can be provided. In the plate, pluralities of thin plates are bonded in layers by welding.</p>
申请公布号 WO2006129343(A1) 申请公布日期 2006.12.07
申请号 WO2005JP09880 申请日期 2005.05.30
申请人 SPANSION LLC;SPANSION JAPAN LIMITED;SHINMA, YASUHIRO 发明人 SHINMA, YASUHIRO
分类号 H01L21/56 主分类号 H01L21/56
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