RADIATION-SENSITIVE RESIN COMPOSITION, LAYERED PRODUCT, AND PROCESS FOR PRODUCING THE SAME

摘要

A radiation-sensitive resin composition which comprises a cycloolefin polymer, a radiation-sensitive compound, and 10-60 parts by weight of an alkoxysilane compound per 100 parts by weight of the cycloolefin polymer; a layered product which comprises a base and, superposed thereon, a resinous film formed from the composition; and a process for producing a layered product which comprises the step of forming a resinous film on a base from the composition. The radiation-sensitive resin composition gives a resinous film having excellent high-temperature shape retention. It has a wide temperature margin for melt flowing in forming a patterned resinous film and is suitable for use also as a resist material.