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发明名称
Membran für Mikroelektromekanischen Schalter und Verfahren zu dessen Herstellung und Verwendung
摘要
申请公布号
DE60215642(D1)
申请公布日期
2006.12.07
申请号
DE2002615642
申请日期
2002.05.14
申请人
RAYTHEON CO.
发明人
CHEN, SHEA;PILLANS, W.;EHMKE, C.;YAO, JAMIE
分类号
B81B3/00;H01H1/00;H01H59/00
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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