| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for assembling a substrate which is compact and can assemble the substrate with high precision. SOLUTION: In four corners of a rack, Z-axial driving mechanisms for moving up and down an upper frame are provided, an upper chamber equipped with an upper table inside is suspended below the upper frame, and a lower chamber equipped with a lower table supported through a plurality of support legs inside is provided on the side of the rack; and the upper chamber and lower chamber are put together across a seal ring to constitute a vacuum chamber, and the upper table is coupled with the upper frame and moved by the Z-axial driving mechanism through the upper frame, which is moved to move up and down the upper chamber, thereby opening and closing the vacuum chamber. COPYRIGHT: (C)2007,JPO&INPIT
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