APPARATUS FOR DETECTING INTERNAL LIQUID LEAKAGE OF FLOW CHANNEL SWITCHING VALVE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for detecting internal liquid leakage of a flow channel switching valve, which can execute a detection even if the leakage is minute. SOLUTION: A solution pump 11 is initiated to pump a solution 2 including no material to be detected by a detector 40 to a flow channel in which the solution 2 flows to the detector 40 through a sampling loop 21 of a ten-way valve 30. After a certain elapse of time from the initiation of pumping the solution 2, a solution pump 10 pumps a solution 1 including a dissolved material to be detected by the detector 40 from a sampling loop 20 of the ten-way valve 30 to a resistive coil 23 through a flow channel 22. If the internal liquid leakage occurs in the ten-way valve 30 at this time, the solution 1 is detected by the detector 40. COPYRIGHT: (C)2007,JPO&INPIT