| 摘要 |
PROBLEM TO BE SOLVED: To provide a supply and exhaust tube allowing an inner member and an outer member to be very easily connected or detached and a distance between the inner member and outer member to be adjusted with high accuracy according to various wall thickness. SOLUTION: The supply and exhaust tube comprises a plurality of locking strip parts 22 circumferentially extending at predetermined spaces in an axial direction in one connecting cylinder part 5 of an inner member 2 and an outer member 3; one or more engaging protrusion parts 25 formed at the other connecting cylinder part 13 of the inner member 2 and outer member 3 and engaged with the locking strip parts; and axial grooves 26 provided in a generating line direction of a cylinder to interrupt the locking strip parts and allowing the engaging protrusion parts to pass in the axial direction while relatively rotating the inner member and outer member in a desired connecting position to engage the engaging protrusion parts with the locking strip parts. COPYRIGHT: (C)2007,JPO&INPIT
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