发明名称 MANUFACTURING METHOD FOR VERTICAL ARRAY TYPE LIQUID CRYSTAL ALIGNMENT LAYER
摘要 PROBLEM TO BE SOLVED: To obtain a low-cost vertical array type liquid crystal alignment layer with high reliability which is used for a liquid crystal display unit, and can use a general liquid crystal material and a film. SOLUTION: A manufacturing method for the vertical array type liquid crystal alignment layer according to the present invention includes a step of supplying a substrate 11 to a chamber 10, a step of forming a film 12 on the substrate 11, and a step of forming the vertical array type alignment layer by processing the film with plasma 13. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006330361(A) 申请公布日期 2006.12.07
申请号 JP20050153908 申请日期 2005.05.26
申请人 IND TECHNOL RES INST 发明人 RYU PING CHING;LEE KING RYANG;SHON MING TAO;LEE SEIDO;OLEG V YAROSHCHUK;RUSLAN M KRAVCHUK
分类号 G02F1/1337 主分类号 G02F1/1337
代理机构 代理人
主权项
地址