SILICON DEFLECTOR ON A SILICON SUBMOUNT FOR LIGHT EMITTING DIODES
摘要
<p>The present invention deals with a process for the manufacturing of reflecting optical barriers comprising silicon and useful in combination with light emitting devices, wherein the process comprises anisotropic wet etching of the silicon material in such a manner that the rate of etching along the crystallographic (111) plane of the silicon material is slower than the rate of etching along the (110) and (100) planes. The present invention further comprises a reflecting optical barrier useful in combination with light emitting devices and a system containing at least one light emitting device comprising a reflecting optical barrier.</p>
