发明名称 SOLDER BONDING METHOD FOR SPUTTERING TARGET
摘要 <p>A method for bonding between a sputtering target and a backing plate using a solder is provided, in which under the state in which the bonding surfaces of the sputtering target and the backing plate are immersed in the melted solder, a cloth is placed and passed between the bonding surfaces, thereby sweeping out oxides and air bubbles between the bonding surfaces.</p>
申请公布号 WO2006129941(A1) 申请公布日期 2006.12.07
申请号 WO2006KR02047 申请日期 2006.05.29
申请人 SONG, JERNG-SIK;APPLIED SCIENCE CORP. 发明人 SONG, JERNG-SIK
分类号 H01L21/60 主分类号 H01L21/60
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