REGENERATION OF USED FERRIC CHLORIDE CLEANING SOLUTION

摘要

A method for regenerating used ferric chloride cleaning solution is provided to largely reduce the production cost due to the manufacture of the etching solution. A vaporized chlorine gas with an amount of 2% is supplied to the waste iron chloride washing solution containing the ferric chloride and hydrochloric acid so that ferrous chloride is oxidized into ferric chloride. Hydrochloric acid with an amount of 19-22% and the ferric chloride with an amount of 8-11% are supplied to the entire reaction material and mixed with each other. The mixture via the first and second processes is supplied to the third process so that the foreign substances are filtered by a filter.