发明名称 FILAMENT ASSEMBLY AND ELECTRON GUN, AND ELECTRON BEAM DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a filament assembly capable of preventing the wasting or degradation of a filament caused by discharge gas from a base so that a life of the filament is not unnecessarily shortened even if radiation heat or electronic collisions are generated from a heated filament. SOLUTION: The filament assembly 11 is equipped with a base 12, a filament supporting part 13 attached to the base 12 and a filament 15 supported by the filament supporting part 13. A cover 17 for gas discharging prevention from the base 12 is formed on a base surface 12a at a side where the filament 15 is arranged. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006331853(A) 申请公布日期 2006.12.07
申请号 JP20050153820 申请日期 2005.05.26
申请人 JEOL LTD 发明人 SAKATA TAKAHIDE;SHIBUKI YOICHI
分类号 H01J37/07;H01J37/28 主分类号 H01J37/07
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