| 摘要 |
<p>This invention provides a wet treatment apparatus that, in wet treatment for pattern formation on a substrate constituting a display panel, can realize reuse of a treating liquid and a pattern material, can reduce the frequency of filter replacement, and can realize a high level of recovery despite the specific gravity of the pattern material used. The wet treatment apparatus comprises a wet treatment tank (1) for carrying out wet treatment, a vibration-type membrane separation apparatus (3) for separating an impurity component from a treatment liquid used in the wet treatment, and a resupply passage (13) for resupplying the treatment liquid, after the separation of the impurity component by the vibration-type membrane separation apparatus (3), into a wet treatment tank (1), whereby the treatment liquid and the pattern material can be rendered reutilizable. The use of the vibration-type membrane separation apparatus (3) can reduce the frequency of replacement of the filter provided in the vibration-type membrane separation apparatus (3) and can realize a high level of recovery of the pattern material despite the specific gravity of the pattern material used.</p> |
