| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor and its manufacturing method which make the certainty of sealing compatible with miniaturization. <P>SOLUTION: The angular velocity sensor is equipped with a first structure which has a stationary portion having an opening, a displacement portion arranged inside this opening, and a connecting portion connecting the stationary portion to the displacement portion; a second structure which has a weight portion jointed to the displacement portion; and a seating arranged surrounding the weight portion and jointed to the stationary portion, and is laminated and arranged on the first structure; a first substrate which is composed by laminating a first metal layer and a first insulating layer, is connected to the stationary portion at its first insulating layer side, and is laminated/arranged on the first structure; and a second substrate which is composed by laminating a second metal layer and a second insulating layer, is connected to the seating at its second insulating layer side, and laminated/arranged on the second structure. <P>COPYRIGHT: (C)2007,JPO&INPIT |
