| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus of processing substrate that can reduce its size in height direction when packing the apparatus for transportation without uninstalling accessories such as a fan filter unit, electrical equipment box, etc. from the apparatus body. SOLUTION: An apparatus body 2 is provided with, e.g., electrical equipment boxes 15 for four chambers holding electronic autoparts of processing chambers 7 to 10 as accessories. An electrical equipment box 15 for each chamber can be turned and displaced to a position for use where it is arranged to the upper side of the apparatus body 2, and to a position for transportation where it is arranged to the side of the apparatus body 2 using a turning axis 19 as a fulcrum, with the turning axis 19 extending in a longitudinal direction of a conveyance chamber 5 at the top edge of the apparatus body 2. COPYRIGHT: (C)2007,JPO&INPIT
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