发明名称 METHOD FOR SETTING IONIC CONCENTRATION OF ELECTROLYTE, AND DEVICE THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a method for setting and maintaining the concentration of deposition metal ions present in an electrolyte for depositing metal on a substrate without being influenced by the corresponding cation concentration, and to provide a device therefor. SOLUTION: Since an electrolytic flow 1 and an exchange liquid flow 2 contact each other via a cation exchange membrane or a microporous membrane 3, deposition metal ions (Ni2+) present in the exchange liquid flow move to the electrolytic flow 2 via the cation exchange membrane or microporous membrane 3 by Donnan dialysis. In this way, the concentration of the deposition metal ions in the electrolytic flow 1 can be set without changing the cation concentration or cation constitution in the electrolyte. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006328536(A) 申请公布日期 2006.12.07
申请号 JP20060145310 申请日期 2006.05.25
申请人 ENTHONE INC 发明人 KONIG AXEL;MOEBIUS ANDREAS;STARK FRANZ-JOSEF
分类号 C23C18/16;B01D61/28;B01D61/58;B01D63/02;B01D63/08;C23C18/31 主分类号 C23C18/16
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