| 摘要 |
PROBLEM TO BE SOLVED: To provide a target tile set used for a target assembly including a plurality of target tiles (30) which are bonded in an array to a backing plate (24) of another material. SOLUTION: Edges (32, 34) of the tile within the interior of the array are formed with complementary beveled edges to form slanted gaps (36) between the tiles. The gap can slant at an angle of between 10°and 55°, preferably, between 15°and 45°with respect to the target normal. The facing sides of tiles can be roughened by the bead blasting method, for both perpendicular and sloping gaps. The area (48) of the backing plate underlying the gap can be roughened or can be coated or overlain with a region of the material of the target, for both perpendicular and sloping gaps. COPYRIGHT: (C)2007,JPO&INPIT
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