| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply facility which can make a refrigerator standing by to be able to start up at any time by keeping on cooling a cold stage of the refrigerator which is not operated so that the temperature of the cold stage is equal to or lower than the condensation temperature of evaporation gas by cold of cryogenic gas taken out from a liquified gas reservoir tank and a gas supply method by the facility. SOLUTION: In the gas supply facility, a sub-gas supply line 6 is branched from a main gas supply line 5 for taking out the cryogenic liquified gas reserved in the liquified gas reservoir tank 1 and supplying the evaporation gas to a gas supply destination, part of the taken-out cryogenic temperature liquified gas is separated into the sub-gas supply line 6 to supply it to a second heat exchanger 6b provided at the cold stage 2a of the refrigerator 2 installed above the liquified gas reservoir tank 1 and refrigerate the cold stage 2a and the cryogenic liquified gas after refrigeration is evaporated and merged with the main gas supply line 5 to supply it to a gas supply destination. COPYRIGHT: (C)2007,JPO&INPIT
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