| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer apparatus equipped with a gimbal mechanism constituted so as to facilitate mold release without damaging a molded uneven shape even in the case of a fine uneven shape, and a transfer method using it. SOLUTION: The transfer apparatus equipped with the gimbal mechanism 45 comprises a table 11 loaded with a material to be molded, a mold holding body 205 for fixing and holding the mold arranged in opposed relation to the surface of the table 11, a gimbal member 201 which holds the mold holding body 205 and has a protruded spherical surface part formed thereto, a gimbal member 203 having a recessed spherical surface part, which is opposed to the protruded spherical surface part so as to come into contact with it, formed thereto, a movable body 19 which holds the gimbal member 203 and can advance and retreat in the direction vertical to the surface of the table 11 and a posture adjusting and holding means for adjusting and holding the posture of the gimbal member 201. The posture adjusting and holding means is constituted by arranging three piezoelectric actuators, each of which is formed by laminating piezoelectric elements, between the gimbal members 201 and 203. COPYRIGHT: (C)2007,JPO&INPIT
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