发明名称 WAFER WITH FIXING AGENT AND METHOD FOR PRODUCING WAFER WITH FIXING AGENT
摘要 <p>A wafer (100) with a fixing agent, having a supporting wafer (1) and the fixing agent (2) arranged on the surface of the supporting wafer (1). The wafer (100) further has an infiltration preventive structure (3) arranged at an edge section of the supporting wafer (1). The fixing agent (2) is arranged in a recess formed by the supporting wafer (1) and the infiltration preventive structure (3). When the supporting wafer (1) and a wafer to be processed are bonded and fixed, the fixing agent (2) is prevented from projecting and contaminating the work environment, and further, a liquid substance can be prevented from infiltrating between the supporting wafer (1) and the wafer to be processed.</p>
申请公布号 WO2006129458(A1) 申请公布日期 2006.12.07
申请号 WO2006JP309483 申请日期 2006.05.11
申请人 JSR CORPORATION;HIEDA, KATSUHIKO 发明人 HIEDA, KATSUHIKO
分类号 H01L21/683;B05C11/08;H01L21/02;H01L21/301;H01L21/304 主分类号 H01L21/683
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