| 摘要 |
A dry cleaning system is provided to rapidly remove contaminants existing on a cleaning target by using laser. A laser generating apparatus(20) generates a laser beam. A laser beam transferring apparatus(30) transfers the laser beam generated from the laser generating apparatus. A laser beam irradiating apparatus(40) adjusts the laser beam transferred by the laser beam transferring apparatus to irradiate the adjusted laser beam to a cleaning target. A scanning apparatus(50) adjusts the irradiation position of the laser beam of the laser beam irradiating apparatus, transferring the laser beam irradiating apparatus over the cleaning target. |
