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发明名称
VERFAHREN ZUR HESTELLUNG EINER ABBILDUNGSVORRICHTUNG
摘要
申请公布号
DE60215691(D1)
申请公布日期
2006.12.07
申请号
DE20026015691
申请日期
2002.12.09
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S.)
发明人
MONGELLAZ;LINCOT, DANIEL
分类号
H01L27/146;H01L31/18
主分类号
H01L27/146
代理机构
代理人
主权项
地址
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