EXHAUST-LINE OF CHEMICAL VAPOR DEPOSITION

摘要

An exhaust line of a chemical vapor deposition apparatus is provided to prevent degradation of valves by rapidly exhausting a powder generated from the exhaust line. A vacuum pump(16) is installed on an exhaust line(14) connected to an exhaust outlet(12) of a process chamber(10). A first valve(18) and a second valve(20) are provided at the exhaust line. The exhaust line(14) connects the exhaust outlet of the process chamber to the vacuum pump to exhaust residual gas in the process chamber. An inclined section(22) is arranged between an end of the exhaust line and the first valve, and inclined with a predetermined angle centering the exhaust outlet. Therefore, a powder is rapidly exhausted.