| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared-ray emitting element easy to manufacture, of which infrared-ray emission efficiency is heightened by improving heat insulation property of a heat insulation layer. SOLUTION: A heat insulation layer 2 having heat conductivity smaller than that of a supporting substrate is formed by turning silicon into porous state from one side surface of the supporting substrate made of silicon, and non-porous silicon serving as a heating element layer 3 remains at the other side face of the supporting substrate, and a pair of pads 4 are formed on the surface of the heating element layer 3. By this, infrared-ray emission efficiency is heightened by improving heat insulation property of a heat insulation layer and manufacture is made easy. COPYRIGHT: (C)2007,JPO&INPIT
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