| 摘要 |
PROBLEM TO BE SOLVED: To retain chip information such as positional information on a wafer in individual semiconductor chips without increasing a chip area and without using a large database. SOLUTION: In the case of replacing wordlines WL<SB>a</SB>, WL<SB>b</SB>and WL<SB>c</SB>having defective addresses (a), (b), and (c) with redundant wordlines WLR<SB>1</SB>to WLR<SB>3</SB>, information is provided to the correspondence between the wordlines WL<SB>a</SB>, WL<SB>b</SB>and WL<SB>c</SB>and the redundant wordlines WLR<SB>1</SB>to WLR<SB>3</SB>, that is a method of replacing. Thus, information of a lot number, a wafer number within the lot, a position within the wafer, etc. is held by the chips without increasing any chip area and without using the large database. COPYRIGHT: (C)2007,JPO&INPIT
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