发明名称 |
Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method |
摘要 |
A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate.
|
申请公布号 |
US2006273692(A1) |
申请公布日期 |
2006.12.07 |
申请号 |
US20060504381 |
申请日期 |
2006.08.15 |
申请人 |
ADVANTEST CORPORATION |
发明人 |
SANPEI HIROKAZU;MIZUNO JUN;YASUOKA MASAZUMI;TAKAYANAGI HUMIKAZU;TOKOSHIMA TAKEHISA;MIYAZAKI MASARU;ESASHI MASAYOSHI |
分类号 |
B81B3/00;H01L41/08;B81C1/00;H01H1/00;H01H37/14;H01H37/52;H01H51/22;H01H61/00;H01L27/00;H01L41/09 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|