A neural probe and method of fabricating same are provided. The probe comprises a plurality of frames connected to each other and to a substrate by respective bimorphs. A probe base is connected by another bimorph to the frames. A probe tip extends from the probe base. The probe can achieve a large vertical motion and out-of-plane curling. The probe can operate according to three modes. The first mode pertains to a large-signal motion for tuning in single-unit neuronal activity. The second pertains to a small-signal motion with lock-in amplifier that increases SNR. The third pertains to burst small-signal motion for clearing tissue responses. Fabrication of a neural probe begins with a processed CMOS chip. Post-CMOS processing incorporates self-aligned selective nickel plating and sacrifices two aluminum layers. The fabrication technique produces a neural probe in which the sensing elements are in close proximity to CMOS circuitry. The fabrication technique obviates the need for post-CMOS masks, alignment, or assembly.
申请公布号
WO2006130794(A2)
申请公布日期
2006.12.07
申请号
WO2006US21338
申请日期
2006.06.01
申请人
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.;NISHIDA, TOSHIKAZU;XIE, HUIKAI;PATRICK, ERIN, E.;SANCHEZ, JUSTIN, C.
发明人
NISHIDA, TOSHIKAZU;XIE, HUIKAI;PATRICK, ERIN, E.;SANCHEZ, JUSTIN, C.