| 摘要 |
#CMT# #/CMT# The arrangement has a door, a handling flange and a transport device (3) arranged with holders (4) in a cleaning area, where the standard containers are lockable in the holders by the handling flanges. The transport device includes several cleaning stations. Two of the cleaning stations are arranged one upon the other and lies one behind the other in the transport direction. The holder is rotatable or swivellable. #CMT# : #/CMT# An independent claim is also included for a method of operating a cleaning arrangement for a standard container in the semiconductor production. #CMT#USE : #/CMT# Used for a standard container e.g. front opening unified pod (FOUP), in the semiconductor production. #CMT#ADVANTAGE : #/CMT# The two cleaning stations are arranged one upon the other and lies one behind the other in the transport direction, such that the problem of large space requirement of the arrangement in the multi-chambered systems is avoided. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The figure shows a complete cleaning arrangement. 3 : Transport device 4 : Holder 5 : Basket 6 : Trough 12 : Infrared source. |
