| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive carbon nanotube sensor responding to a measuring gas at a high speed with high sensitivity and easy to manufacture, and its manufacturing method. <P>SOLUTION: The carbon nanotube sensor is mainly characterized in that shot key joining parts 6 are formed between a semiconductor carbon nanotube material 2 and metal electrodes 1 and 1b. In the manufacturing method of the carbon nanotube sensor, the work functions of the semiconductor carbon nanotube material 2 and a metal are respectively measured under a measuring gas atmosphere and compared with the work function of the metal corresponding to a p-type or an n-type to select the semiconductor carbon nanotube material 2 large or small in work function and the semiconductor carbon nanotube material 2 is crosslinked between the metal electrodes. <P>COPYRIGHT: (C)2007,JPO&INPIT |
