| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining device that is small, inexpensive, and capable of high-speed scanning without being affected by a scan distance or a machining pattern, by using a galvanometer and a table driving mechanism. <P>SOLUTION: The laser beam machining device is equipped with at least two galvano meters 14. In at least either in the optical path from a laser oscillator 10 through a first and a second galvano mirror 15a, 15b to a workpiece 17 or in the arrangement of the first and second galvanometers, a mechanism for suppressing the size to be irradiated with the beam is positioned so that the area of the part irradiated by the laser beam of the first and second galvano mirrors is made small, wherein the angle of incidence and of reflection for the laser beam is set to be not larger than 45°for both the first and second galvano mirrors. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
