LASER BEAM MACHINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of more surely forming a hole with a small diameter.

SOLUTION: The laser beam machining apparatus is intended to form a hole H in a workpiece 3 by emitting a laser beam L thereto. The apparatus 1 comprises a laser oscillator 5 for outputting the laser beam L for irradiating the workpiece 3, a light converging optical system 11 for converging the laser beam to emit to the workpiece, a photodetector 27 for receiving reflection light as the laser beam emitted to and reflected by the workpiece, and a controller 29 for adjusting a relative position between the light converging optical system and the workpiece so that an interference component caused by the hole is contained in the detection result of the reflection light by the photodetector.

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