| 摘要 |
PROBLEM TO BE SOLVED: To provide a guide device capable of accurately moving a slider even if straightness of a guide rail is low. SOLUTION: When a slide table 13 is relatively moved with respect to the guide rails 12A, 12B, the slide table 13 is hardly deformed, but static pressure surfaces 12e, 12f of the guide rails 12A, 12B in the traveling direction are deformed according to the movement, namely, the deformation is corrected. Accordingly, the slide table 13 can be linearly moved irrespective of the deformation of the guide rails 12A, 12B. Since the center G is retained within the shiftΔ2<<Δ1 in the distance with respect to the traveling direction, high-precision machining can be achieved. COPYRIGHT: (C)2007,JPO&INPIT
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