摘要 |
PROBLEM TO BE SOLVED: To provide a droplet-discharging apparatus capable of controlling the discharge quantity of a high-viscosity liquid material with high accuracy and a droplet-discharging apparatus, an electro-optical panel and an electronic equipment with uniformity of the film thickness. SOLUTION: The droplet-discharging apparatus has a heater 30H for the discharging head on the outer peripheral surface of a discharging head 30 so as to surround the nozzle plate 31 of the head 30. The heater 30H is so constructed that its lower part 30S expands downward below the nozzle plate 31 or on the substrate stage side 23. COPYRIGHT: (C)2007,JPO&INPIT
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