| 摘要 |
PROBLEM TO BE SOLVED: To measure the surface shape of a measuring object with a weak contact force, while changing the contact force. SOLUTION: A measuring probe 32 is supported at an inclinationθ. Since the retreating force of the measuring probe 32 is generated by the inclinationθ, far smaller mgsigθthan a self-weight m is acquired. The measuring probe 32 is energized with a pushing force Fc by an air cylinder 40. Hereby, since the contact force of the measuring probe 32 to a work W comprises a difference (F=Fc-mgsigθ) between the gage head self-weight inclination component mgsigθand the pushing force Fc by the air cylinder 40, the contact force can be weakened by a large amount. In addition, the contact force can be changed by changing the pushing force Fc by the air cylinder 40. COPYRIGHT: (C)2007,JPO&INPIT |
